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Browsing by Ahn, Jin-hoAuthor

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Characterization of Free-Standing Nano-Membranes by Using Ellipsometry Go to Link

Park, Sungmo; Lee, Changho; An, Ilsin; Kim, Min-Su; Park, Jin-Goo; Ahn, Jin-ho

ArticleIssue Date2018CitationJournal of the Korean Physical Society, v.72, no.8, pp 868 - 872Publisher한국물리학회

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Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask Go to Link

Lee, Seung-ho; Kang, Bong-kyun; Kim, Min-su; Ahn, Jin-ho; Cho, Han-ku; Lee, Han-shin; Park, Jin-Goo

ArticleIssue Date2012CitationJapanese Journal of Applied Physics, v.51, no.9, pp 1 - 6PublisherIOP Publishing Ltd

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Browsing by Ahn, Jin-hoAuthor

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