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Effect of the additives on controlling ceria-brush chemical bonding during post-CMP cleaning

Sahir, Samrina; Han, Kwang-Min; Bisht, Sanjay; Kim, Tae-Gon; Park, Jin-Goo

ArticleIssue Date2025CitationMaterials Science and Engineering: B, v.317PublisherElsevier Ltd

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Interaction study of copper ions and polyvinyl acetal (PVA) brush during copper post-CMP cleaning: Experimental and density functional theory study

Bisht, Sanjay; Yadav, Maheepal; Kim, Byung Hyun; Kim, Tae-Gon; Park, Jin-Goo

ArticleIssue Date2025CitationAPPLIED SURFACE SCIENCE, v.695PublisherELSEVIER

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Browsing by Bisht, SanjayAuthor

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