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Area-selective atomic layer deposition of Ru thin films using phosphonic acid self-assembled monolayers for metal/dielectric selectivity Go to Link

Lee, Seo-Hyun; Lee, Jeong-Min; Lee, Ji Hun; Kwak, Junghun; Chung, Sung-Woong; Kim, Woo - Hee

ArticleIssue Date2022CitationMaterials Letters, v.328, pp 1 - 4PublisherElsevier BV

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