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Investigation of Selective Wet Etching of SiGe Substrates for High-Performance Device Manufacturing Go to Link

Kim, Dong-Gyu; Vereecke, Guy; Gowda, Pallavi Puttarame; Wostyn, Kurt; Kim, Tae-Gon; Park, Jin-Goo; Sanchez, Efrain Altamirano

ArticleIssue Date2023CitationSolid State Phenomena, v.346, pp 34 - 39PublisherTrans Tech Publications Ltd

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Browsing by Gowda, Pallavi PuttarameAuthor

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