Browsing by Jo, SanghyunAuthor
Showing results 1 to 4 of 4
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Helium Metastable Distributions and Their Effect on the Uniformity of Hydrogenated Amorphous Silicon Depositions in He/SiH4 Capacitively Coupled PlasmasGo to Linkopen access
Jo, Sanghyun; Kang, Suik; Lee, Kyungjun; Kim, Ho Jun
ArticleIssue Date2022CitationCoatings, v.12, no.9, pp 1 - 16PublisherMDPI AG
SCIESCOPUS
Importance of higher-level excited species in argon remote plasma sources: Numerical modeling with consideration of detailed chemical reaction pathwaysGo to Link
Cheon, Cheongbin; Yoon, Jung Hwan; Jo, Sanghyun; Kim, Ho Jun; Lee, Hae June
ArticleIssue Date2022CitationPlasma Processes and Polymers, v.19, no.6, pp 1 - 17PublisherWiley - V C H Verlag GmbbH & Co.
SCIESCOPUS
Reactor optimization strategies for remote plasma sources: Numerical insights into argon inductively coupled plasma at Torr pressuresGo to Link
Jo, Sanghyun; Kim, Ho Jun
ArticleIssue Date2025CitationPhysics of Fluids, v.37, no.1PublisherAmerican Institute of Physics
SCISCIESCOPUS
Wafer-Scale Synthesis of Reliable High-Mobility Molybdenum Disulfide Thin Films via Inhibitor-Utilizing Atomic Layer DepositionGo to Link
Jeon, Woojin; Cho, Yeonchoo; Jo, Sanghyun; Ahn, Ji-Hoon; Jeong, Seong Jun
ArticleIssue Date2017CitationAdvanced Materials, v.29, no.47, pp 1 - 8PublisherWILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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