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Browsing by Kang, J.-W.Author

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Overlay and CD uniformity variation due to wafer thermal deformation caused by EUV exposure Go to Link

Ko, H.-C.; Choi, W.-Y.; Kim, M.-W.; Kang, J.-W.; Jeon, J.-H.; You, D.-K.; Oh, H.-K.

ArticleIssue Date2023CitationJapanese Journal of Applied Physics, v.62, no.SG, pp 1 - 10PublisherInstitute of Physics

SCOPUS

Through pitch line width difference minimization by pixel source optimization

Kim, M.-W.; Yu, D.-K.; Chae, Y.-J.; Ko, H.-C.; Kang, J.-W.; Michael-Yeung,; Son, S.-W.; Oh, H.-K.

ArticleIssue Date2024CitationProceedings of SPIE - The International Society for Optical Engineering, v.13216, pp 1 - 6PublisherSPIE

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Browsing by Kang, J.-W.Author

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