Kim, 1 Young-Sik; Nam,Hyo-Jin; Jang, SeongSoo; Lee, Caroline Sunyong; Jin, Won-Hyeog; Cho, 1 Il-Joo; Bu,Jong-Uk; Chang,Sun-Il; Yoon, Euisik
ArticleIssue Date2006CitationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), v.2006, pp 922 - 925