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Acoustic field analysis of a T type waveguide in single wafer megasonic cleaning and its effect on particle removal

Lee, Yang Lae; Lim, Eui Su; Kang, Kook Jin; Kim, Hyun Se; Kim, Tae Gon; Lee, Sang Ho; Park, Jin-Goo

ArticleIssue Date2008CitationSolid State Phenomena, v.134, pp 229 - 232PublisherScitec Publications Ltd.

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Browsing by Kim, Hyun SeAuthor

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