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Damage/organic free ozonated DI water cleaning on EUVL Ru capping layer

Lee, Seung Ho; Kang, Bong Kyun; Kim, Hyuk min; Kim, Min soo; Cho, Han ku; Jeon, Chan uk; Ko, Hyung ho; Lee, Han shin; Ahn, Jin ho; Park, Jin-Goo

ConferenceIssue Date2010PlaceMonterey, CA

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Design and analysis of an axial-flux PM vernier machine for auto-focusing systems Go to Link

Kim, Min soo; Zhao, Fei; Kwon, Byung il

ArticleIssue Date2016Citation2015 18th International Conference on Electrical Machines and Systems, ICEMS 2015, pp.1792 - 1796PublisherInstitute of Electrical and Electronics Engineers Inc.

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Browsing by Kim, Min sooAuthor

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