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Formation of Silicon (Si) Grains in AlN Thin Layer Grown on an Si(111) Substrate: Effect of Deposition Sequence Go to Link

Kim, Young Heon; Ahn, Sang Jung; Lee, Sang Tae; Kim, Moondeock; Oh, Jae Eung

ArticleIssue Date2015CitationBULLETIN OF THE KOREAN CHEMICAL SOCIETY, v.36, no.3, pp 1008 - 1012PublisherWILEY-V C H VERLAG GMBH

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Browsing by Kim, MoondeockAuthor

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