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SCIESCOPUS
Aerial image deformation caused by various defects of EUV pelliclesGo to Link

Lee, Sung-Gyu; Yeung, Michael; Barouch, Eytan; Kim, Mun-Ja; Kim, Seong-Sue; Oh, Hye-Keun

ArticleIssue Date2014CitationProceedings of SPIE - The International Society for Optical Engineering, v.9048PublisherSPIE
SCIESCOPUS
Aerial image of mesh supported extreme ultraviolet pellicleGo to Link

Ko, Ki-Ho; Kim, Guk-Jin; Yeung, Michael; Barouch, Eytan; Kim, Mun-Ja; Kim, Seung-Sue; Oh, Hye-Keun

ArticleIssue Date2014CitationProceedings of SPIE - The International Society for Optical Engineering, v.9048, pp 1 - 8PublisherSPIE
SCIESCOPUS
Effect of defects on extreme ultraviolet pellicleGo to Link

Kim, In-Seon; Kim, Guk-Jin; Yeung, Michael; Barouch, Eytan; Kim, Mun-Ja; Kim, Seong-Sue; Kim, Ji-Won; Oh, Hye-Keun

ArticleIssue Date2014CitationProceedings of SPIE - The International Society for Optical Engineering, v.9048, pp 1 - 9PublisherSPIE
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