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Browsing by Kumar, SumitAuthor

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Benzethonium chloride as a tungsten corrosion inhibitor in neutral and alkaline media for the post-chemical mechanical planarization application Go to Link

Punathil Meethal, Ranjith; Jalalzai, Palwasha; Muskan; Kumar, Sumit; Peter, Jerome; Klipp, Andreas; Kim, Tae-Gon; Park, Jin-Goo

ArticleIssue Date2023CitationJournal of Colloid and Interface Science, v.643, pp 465 - 479PublisherAcademic Press

SCIESCOPUS

Combined Effects of PVA Brush Scrubbing Parameters and Processes on Post-CMP Cross-Contamination Go to Link

Han, Kwang-Min; Kumar, Sumit; Khan, Mir Jalal; Lee, Jae-Hyeong; Kim, Tae-Gon; Park, Jin-Goo

ArticleIssue Date2025CitationECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, v.14, no.4, pp 1 - 21PublisherELECTROCHEMICAL SOC INC

SCIESCOPUS

Metal ion contamination and removal on oxide surfaces and polyvinyl acetal brushes during the tungsten post-CMP cleaning process Go to Link

Jalalzai, Palwasha; Kumar, Sumit; Meethal, Ranjith Punathil; Han, Kwang-Min; Klipp, Andreas; Kim, Tae-Gon; Park, Jin-Goo

ArticleIssue Date2025CitationSurfaces and Interfaces, v.72, pp 1 - 15PublisherElsevier B.V.

SCIESCOPUS

Morphological and corrosion studies of ammonium phosphate and caesium nitrate treated Al coating deposited by arc thermal spray process Go to Link

Singh, Jitendra Kumar; Yang, Hyun-Min; Lee, Han-Seung; Kumar, Sumit; ASLAM, Fahid; Alyousef, Rayed; Alabduljabbar, Hisham

ArticleIssue Date2021CitationSurfaces and Interfaces, v.22, pp 1 - 13PublisherElsevier

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Browsing by Kumar, SumitAuthor

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