Chung, Hong Keun; Pyeon, Jung Joon; Baek, In-Hwan; Lee, Ga-Yeon; Lee, Hansol; Won, Sung Ok; Han, Jeong Hwan; Chung, Taek-Mo; Park, Tae Joo; Kim, Seong Keun
ArticleIssue Date2020CitationJournal of Vacuum Science and Technology A, v.38, no.1, pp.1 - 6PublisherAmerican Institute of Physics