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Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography MaskGo to Link

Lee, Seung-ho; Kang, Bong-kyun; Kim, Min-su; Ahn, Jin-ho; Cho, Han-ku; Lee, Han-shin; Park, Jin-Goo

ArticleIssue Date2012CitationJapanese Journal of Applied Physics, v.51, no.9, pp 1 - 6PublisherIOP Publishing Ltd
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