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Browsing by Lim, Chang-MoonAuthor

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193nm inspection of extreme ultraviolet mask absorber defect Go to Link

Kim, Guk-Jin; Kim, In-Seon; Yeung, Michael; Lim, Chang-Moon; Oh, Hye-Keun

ArticleIssue Date2014CitationProceedings of SPIE - The International Society for Optical Engineering, v.9048, pp 1 - 7PublisherSPIE

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Characteristics and prevention of pattern collapse in EUV lithography Go to Link

Chang, Wook; Kim, Eun-Jin; Kang, Young-Min; Park, Seung-Wook; Lim, Chang-Moon; Won, Ki-Tak; Kim, Jai-Soon; Oh, Hye-Keun

ArticleIssue Date2007CitationProceedings of SPIE - The International Society for Optical Engineering, v.6517, no.PART 2, pp 1 - 7

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Effect of extreme-ultraviolet pellicle support to patterned mask Go to Link

Ko, Ki-ho; Kim, Eun-Jin; Kim, Ji-Won; Park, Jun-Taek; Lim, Chang-Moon; Oh, Hye-keun

ArticleIssue Date2012CitationProceedings of SPIE - The International Society for Optical Engineering, v.8322, pp 1 - 8PublisherSPIE

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Browsing by Lim, Chang-MoonAuthor

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