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Browsing by Michael-Yeung,Author

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Improving process window and resolution through source polarization in High-NA EUV

Chae, Y.-J.; Kim, M.-W.; Yu, D.-K.; Son, S.-W.; Michael-Yeung,; Oh, H.-K.

ArticleIssue Date2024CitationProceedings of SPIE - The International Society for Optical Engineering, v.13216PublisherSPIE

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Through pitch line width difference minimization by pixel source optimization

Kim, M.-W.; Yu, D.-K.; Chae, Y.-J.; Ko, H.-C.; Kang, J.-W.; Michael-Yeung,; Son, S.-W.; Oh, H.-K.

ArticleIssue Date2024CitationProceedings of SPIE - The International Society for Optical Engineering, v.13216, pp 1 - 6PublisherSPIE

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Browsing by Michael-Yeung,Author

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