ScholarWorks@Hanyang University ERICA Campus: Browsing ScholarWorks

Browsing by Rhim, JusangAuthor

Showing results 1 to 2 of 2

SCIESCOPUSKCI

Determination of the Optical Properties of a Pellicle and Their Effects on High NA Lithography Go to Link

Lee, Sungjoo; Jung, J.; Rhim, Jusang; An, Ilsin

ArticleIssue Date2009CitationJournal of the Korean Physical Society, v.55, no.5, pp 1772 - 1775Publisher한국물리학회

Ellipsometric inspection of the inner surface of pellicle-covered masks Go to Link

Lee, Sangyouk; Song, Chulgi; Rhim, Jusang; Lee, Hyoungjoo; Kyoung, Jaisun; Chin, Soobok; Ahn, Taehyuk; 안일신

ArticleIssue Date2008CitationSPIEPublisherThe international Society for Optical engineering

RSS_1.0 RSS_2.0 ATOM_1.0

55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Browsing by Rhim, JusangAuthor

BROWSE