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Browsing by Ryu, Sang GilAuthor

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Optimum design of a 740 mm-long lens mount for a large-area and high-speed line beam proximity exposure Go to Link

Lee, Changkyu; Ryu, Sang Gil; Oh, Je Hoon

ArticleIssue Date2020CitationOPTIK, v.208, pp 1 - 10PublisherELSEVIER GMBH

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Optimum design of a large area, flexure based XY theta mask alignment stage for a 12-inch wafer using grey relation analysis Go to Link

Lee, Changkyu; Lee, Jae Woong; Ryu, Sang Gil; Oh, Je Hoon

ArticleIssue Date2019CitationROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING, v.58, pp 109 - 119PublisherPERGAMON-ELSEVIER SCIENCE LTD

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Browsing by Ryu, Sang GilAuthor

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