ScholarWorks@Hanyang University ERICA Campus: Browsing ScholarWorks

Browsing by Song, Hee jinAuthor

Showing results 1 to 3 of 3

SCIESCOPUS

A novel cleaning approach to remove the carbon contaminant from Ru surface of EUV mask Go to Link

Kim, Min su; Song, Hee jin; Kim, Hyun tae; Park, Jin-Goo

ArticleIssue Date2017CitationECS Transactions, v.80, no.2, pp 119 - 127PublisherElectrochemical Society, Inc.

SCIESCOPUS

Modification of DHF for removal of metals from silicon wafer Go to Link

Lee, Dong Hwan; Song, Hee jin; Jang, Sung hae; Kim, Hyun tae; Yi, Jae Hwan; Choi, Eunsuck; Park, Jin-Goo

ArticleIssue Date2017CitationECS Transactions, v.80, no.2, pp 249 - 256PublisherElectrochemical Society, Inc.

SCOPUS

Removal of crn contamination from euv mask backside using dry cleaning Go to Link

Kim, Hyun tae; Yerriboina, Nagendra Prasad; Song, Hee jin; Park, Jin-Goo

ArticleIssue Date2018CitationSolid State Phenomena, v.282 , pp 59 - 63PublisherScitec Publications Ltd.

RSS_1.0 RSS_2.0 ATOM_1.0

55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Browsing by Song, Hee jinAuthor

BROWSE