ScholarWorks@Hanyang University ERICA Campus: Browsing ScholarWorks

한국어
LIBRARY

Browsing by Yang, Chan KiAuthor

Showing results 1 to 2 of 2

SCOPUS

Post W CMP cleaning without HF cleans Go to Link

Kang, Young-Jae; Yang, Chan Ki; Kwon, Tae Young; Park, Jin-Goo; Jo, Jung Hun; Lim, Geun Sik

ArticleIssue Date2007CitationECS Transactions, v.11, no.2, pp 441 - 445PublisherElectrochemical Society, Inc.

Removal of slurry residues in tungsten plug during chemical mechanical planarization

Yang, Chan Ki; Park, Jin-Goo; Jo, Jung-Hun; Lim, Geun-Sik; Kim, Tae-Hyung; Jo, In-Soo

ConferenceIssue Date2007Place스위스; Cheju Isl, SOUTH KOREA

RSS_1.0 RSS_2.0 ATOM_1.0

55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Browsing by Yang, Chan KiAuthor

BROWSE