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Enhancing the crystallinity and dielectric performance of ALD-grown SrTiO3 films by introducing a sub-nm-thick Pt layeropen access

Chung, Hong Keun; Jeon, Jihoon; Ye, Seungwan; Kim, Sung-Chul; Won, Sung Ok; Park, Tae Joo; Kim, Seong Keun

ArticleIssue Date2025CitationJournal of Materials Chemistry C, v.13, no.13, pp 6851 - 6858PublisherRoyal Society of Chemistry
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