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Impact of deformed extreme-ultraviolet pellicle in terms of CD uniformity Go to Link

Kim, In-Seon; Yeung, Michael; Barouch, Eytan; Oh, Hye-Keun

ArticleIssue Date2015CitationProceedings of SPIE - The International Society for Optical Engineering, v. 9658, pp 1 - 14PublisherSPIE

SCIESCOPUS

Non-isotropic shadow effect with various pattern direction in anamorphic high numerical aperture system Go to Link

Kim,In-Seon; Kim,Guk-Jin; Yeung, Michael; Barouch, Eytan; Oh, Hye-Keun

ArticleIssue Date2016CitationProceedings of SPIE - The International Society for Optical Engineering, v.9776, pp 1 - 9PublisherSPIE

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Browsing by Yeung, MichaelAuthor

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