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Browsing by Yoon, Bo UnAuthor

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SCIESCOPUS

Adhesion and removal of silica and ceria particles on the wafer surfaces in STI and poly Si CMP Go to Link

Hong, Yi-Koan; Kang, Young Jae; Park, Jin-Goo; Han, Sang Yeob; Yun, Seong Kyu; Yoon, Bo Un; Hong, Chang Ki

ArticleIssue Date2008CitationSolid State Phenomena, v.134, pp 159 - 163PublisherScitec Publications Ltd.

SCOPUS

Effect of poly silicon wettability on polymeric residue contamination Go to Link

Kang, Young-Jae; Park, Jin-Goo; Hong, Yi-Koan; Han, Sang Yeob; Yun, Seong Kyu; Yoon, Bo Un; Hong, ChangKi

ArticleIssue Date2007CitationECS Transactions, v.11, no.2, pp 455 - 461PublisherElectrochemical Society, Inc.

Effect of wettability of poly silicon on CMP behavior

Kang, Young-Jae; Kang, Bong Kyun; Kim, In-Kwon; Park, Jin-Goo; Hong, Yi-Koan; Han, Sang Yeob; Yun, Seong Kyu; Yoon, Bo Un; Hong, Chang Ki

ConferenceIssue Date2007PlaceSan Francisco, CA

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Browsing by Yoon, Bo UnAuthor

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