CD error caused by aberration and it&apos;s possible compensation by optical proximity correction in extreme ultraviolet lithography

오혜근

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CD error caused by aberration and it's possible compensation by optical proximity correction in extreme ultraviolet lithography

Authors: 오혜근

Issue Date: 1-Mar-2017

Publisher: SPIE

Citation: SPIE ADVANCED LITHOGRAPHY

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/10423

Conference Name: SPIE ADVANCED LITHOGRAPHY

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Appears in Collections: COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF APPLIED PHYSICS > 2. Conference Papers

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