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반도체 평탄화 CMP 기술
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진구 | - |
| dc.date.accessioned | 2021-07-07T08:40:56Z | - |
| dc.date.available | 2021-07-07T08:40:56Z | - |
| dc.date.issued | 2001-07 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/104661 | - |
| dc.format.extent | 283 | - |
| dc.publisher | 북스힐 | - |
| dc.title | 반도체 평탄화 CMP 기술 | - |
| dc.type | Book | - |
| dc.description.isChapter | N | - |
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)