Microelectronic Applications of Chemical Mechanical Planarization
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2021-07-07T08:41:01Z | - |
dc.date.available | 2021-07-07T08:41:01Z | - |
dc.date.issued | 2007-12 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/104665 | - |
dc.format.extent | 44 | - |
dc.publisher | Wiley-Interscience | - |
dc.title | Microelectronic Applications of Chemical Mechanical Planarization | - |
dc.type | Book | - |
dc.relation.isPartOf | Microelectronic Applications of Chemical Mechanical Planarization | - |
dc.description.isChapter | Y | - |
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