Heterogeneous CMOS Photonics based on SiGe/Ge and III-V Semiconductors Integrated on Si Platform
- Authors
- Takenaka, M.; 김영현; Han, Jaehoon; Kang, Jian; Ikku, Y.; Yongpeng Cheng; Park, Jinkwon; Yoshida, M.; Takashima, S.; Takagi, S.
- Issue Date
- Jun-2017
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Keywords
- CMOS photonics; electronic-photonic integrated circuits; heterogeneous integration; Si photonics
- Citation
- IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, v.23, no.3, pp.64 - 76
- Indexed
- SCIE
SCOPUS
- Journal Title
- IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
- Volume
- 23
- Number
- 3
- Start Page
- 64
- End Page
- 76
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/10530
- DOI
- 10.1109/JSTQE.2017.2660884
- ISSN
- 1077-260X
- Abstract
- The heterogeneous integration of SiGe, Ge, and III-V semiconductors on Si provides many opportunities to develop high-performance photonic integrated circuits through complementary metal oxide semiconductor (CMOS) processes. We found that strained SiGe possesses greater free-carrier effects than Si, contributing to the improved modulation efficiency of Si-based optical modulators. In addition to low-dark-current Ge photodetectors (PDs) with GeO 2 passivation, we investigated Ge CMOS photonics platform for midinfrared wavelengths. We demonstrated Ge passive waveguides and carrier-injection variable optical attenuators (VOAs) on a Ge-on-insulator wafer. We also investigated III-V CMOS photonics platform on a III-V-on-insulator (III-V-OI) wafer. The strong optical confinement in the III-V-OI structure enabled the realization of ultrasmall III-V passive waveguides similarly to those in Si photonics. Carrier-injection InGaAsP optical switches and VOAs as well as InGaAs waveguide PDs were also demonstrated on III-V-OI wafers. We discuss the opportunities and challenges of heterogeneous CMOS photonics technologies to develop high-performance electronic-photonic integrated circuits for near-infrared and midinfrared applications.
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