Residual Stress Measurement of Micro Gold Electroplated Structure
- Authors
- Baek, Chang Wook; Kim, Yong Kweon; Cho, Chul Ho; Ahn, Yoomin
- Issue Date
- Apr-2002
- Publisher
- The Korean Society of Precision Engineering
- Citation
- International Journal of the Korean Society of Precision Engineering, v.3, no.2, pp 72 - 77
- Pages
- 6
- Indexed
- KCI
- Journal Title
- International Journal of the Korean Society of Precision Engineering
- Volume
- 3
- Number
- 2
- Start Page
- 72
- End Page
- 77
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/106203
- ISSN
- 2234-7593
- Abstract
- In order to find a residual stress in the micro-machined beam, first natural frequency of the beam that has the residual stress inside is analyzed using the Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process. The made structure is clamped-clamped beam and its 1st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-machined beam to ideal beam is calculated by FEM. The residual stress is estimated from the equivalent length and the measured natural frequency.
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Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MECHANICAL ENGINEERING > 1. Journal Articles
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