The effect of Mo addition on the microstructural evolution and mechanical properties of Zr-Cu-based metallic glass thin films
- Authors
- Shin, Jung Ho; Kim, Doo-In; Cho, Hong-Baek; Kim, Do Hyung; Suematsu, Hisayuki; Kim, Kwang Ho
- Issue Date
- Apr-2014
- Publisher
- 세라믹공정연구센터
- Keywords
- Zr-Cu-Mo; MGTF; Nanocomposite; Co-sputtering
- Citation
- Journal of Ceramic Processing Research, v.15, no.2, pp.130 - 135
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- Journal of Ceramic Processing Research
- Volume
- 15
- Number
- 2
- Start Page
- 130
- End Page
- 135
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/106258
- DOI
- 10.36410/jcpr.2014.15.2.130
- ISSN
- 1229-9162
- Abstract
- Ternary Zr-Cu-Mo metallic glass thin films (MGTFs) with various Mo contents were synthesized on Si (100) wafers and AISI 304 stainless steel substrates by a magnetron co-sputtering technique, using Zr64Cu36 and Mo targets in an Ar gas environment. The effects of Mo addition in a binary Zr64Cu36 MGTF were investigated, with regard to the microstructural evolution and mechanical properties of Zr-Cu-Mo thin films. Instrumental analyses, such as EPMA, XRD, and HR-TEM revealed that Zr-Cu-Mo films with an Mo content below 38 at.% maintained the monolithic amorphous phase structure. However, when Mo content is added above 46 at.%, the Zr-Cu-Mo films begin to have nanocomposite structures of well-distributed Mo2Zr and Mo crystallites embedded in an amorphous matrix. The hardness and elastic modulus of amorphous Zr-Cu-Mo films showed nearly constant values of 10 GPa and 166 GPa, respectively, regardless of their Mo content. As Zr-Cu-Mo films have nanocomposite structures at a Mo content of 52 at.%, their mechanical properties showed increased hardness and elastic moduli of 17 GPa and 240 GPa, respectively. The Mo addition generally reduced the average friction coefficient of the ternary Zr-Cu-Mo thin films regardless of phase structure, which can be attributed to the effect of the Mo addition.
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