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KCI
Cu ECMP 공정에서 전해액이 연마거동에 미치는 영향
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권태영; 김인권;
김태곤
; 조병권;
박진구
Article
Issue Date
2008
Citation
Korean Journal of Materials Research, v.18, no.6, pp.334 - 338
Publisher
한국재료학회
1
Discover
Author
Park, Jin Goo
1
KIM, TAE GON
1
권태영
1
김인권
1
조병권
1
Subject
Copper
1
Copper alloys
1
Cu ECMP
1
electrochemical reaction.
1
KOH
1
NaNO3
1
potentiodynamic curve
1
Voltage regulators
1
Date Issued
2008
1
Type
Article
1
Journal
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1
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kci
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scopus
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