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2. Conference Papers(COLLEGE OF ENGINEERING SCIENCES > MAJOR IN APPLIED MATERIAL & COMPONENTS > 2. Conference Papers)37

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Collection's Items (Sorted by Issue Date in Descending order): 21 to 37 of 37

Evaluation and effective removal of organic impurity sources during the synthesis process of roller-type PVA brushes for efficient post-CMP cleaning

김태곤

ConferenceIssue Date2023PlaceKanazawa, Japan
Pinpoint particle removal for EUV Pellicle Productivity Enhancement

김태곤

ConferenceIssue Date2023PlaceBrugge, Belgium
Investigation of Selective Wet Etching of SiGe Substrates for High-Performance Device Manufacturing

김태곤

ConferenceIssue Date2023PlaceBrugge, Belgium
Selective removal of EUV-exposed particles from pellicle

김태곤

ConferenceIssue Date2023PlaceSan Jose, USA
Characterization of Wetting Behavior on High Aspect Ratio Multilayer Structure

김태곤

ConferenceIssue Date2022PlaceVancouver, Canada
An Analysis Method of the Wetting Characteristic of High Aspect Ratio Structure

김태곤

ConferenceIssue Date2021
Effect of particle Agglomeration by Air bubble during Tungsten (W) CMP Process

김태곤

ConferenceIssue Date2020
DHF을 사용한 Brush scrubbing에 발생하는 PVA brush의 변화 연구

김태곤

ConferenceIssue Date2020
Study on PVA Brush Particle Loading during Post CMP Cleaning

김태곤

ConferenceIssue Date2020
Mechanisms of Colloidal Ceria Contamination and Cleaning during Oxide Post-CMP

김태곤

ConferenceIssue Date2020
Sidewall characterization and 3D-AFM applications

김태곤

ConferenceIssue Date2020
Automated In-line AFM for Surface Profiling in CMP Applications

김태곤

ConferenceIssue Date2019PlaceHsinchu, Taiwan
Mechanisms of Colloidal Ceria Contamination and Cleaning during Oxide Post-CMP

김태곤

ConferenceIssue Date2009
Post-CMP cleaning: Interaction between particles and surfaces

Park, Jin-Goo; Kim, Tae Gon

ConferenceIssue Date2007Place독일
Fundamentals of post-CMP cleaningGo to Link

Park, Jin-Goo; Kim, Tae-Gon

ConferenceIssue Date2007PlaceSan Francisco, CA
Tribological reliability of vapor deposited 1H,1H,2H,2H- Perfluorodecyltrichlorosilane by AFM

Kim, Tae Gon; Busnaina, Ahmed.A.; Park, Jin-Goo

ConferenceIssue Date2007PlaceSan Francisco, CA
Effect of corrosion inhibitor, 1H-benzotriazole (BTAH), on particle adhesion in Cu CMP

Song, Jae-Hoon; Hong, Yi-Koan; Kim, Tae-Gon; Kang, Young-Jae; Kim, In-Kwon; Ran, Ja-Hyung; Park, Jin-Goo; Busnaina, Ahmed A.

ConferenceIssue Date2005Place미국; Los Angeles, CA
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