Thermal stress analysis of the extreme ultraviolet multi-stack pellicle with high emissivity coating by finite element method

오혜근

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Thermal stress analysis of the extreme ultraviolet multi-stack pellicle with high emissivity coating by finite element method

Authors: 오혜근

Issue Date: 26-Oct-2016

Publisher: EIDEC

Citation: 2016 International Symposium on Extreme Ultraviolet Lithography

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/11324

Conference Name: 2016 International Symposium on Extreme Ultraviolet Lithography

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Appears in Collections: COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF APPLIED PHYSICS > 2. Conference Papers

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