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Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Han, Soyoung | - |
| dc.contributor.author | Yerriboina, Nagendra Prasad | - |
| dc.contributor.author | Sahoo, Bichitra Nanda | - |
| dc.contributor.author | Kang, Bong Kyun | - |
| dc.contributor.author | Klipp, Andreas | - |
| dc.contributor.author | Park, Jin Goo | - |
| dc.date.accessioned | 2023-07-05T06:30:58Z | - |
| dc.date.available | 2023-07-05T06:30:58Z | - |
| dc.date.issued | 2021-02 | - |
| dc.identifier.issn | 1012-0394 | - |
| dc.identifier.issn | 1662-9779 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/113551 | - |
| dc.description.abstract | Megasonic cleaning is one of the promising technologies to remove the particles during semiconductor processing. Acoustic bubble cavitation plays a key role in removing the particles. In this work, the effect of an anionic surfactant sodium dodecyl sulfate (SDS) on a bubble in the presence of hydrogen dissolved DIW water was studied. The bubble dynamics were observed using a highspeed camera. It was found that with the increase of surfactant the bubble characteristics were changed very significantly. Several parameters affecting the bubble dynamics were investigated. | - |
| dc.format.extent | 5 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | Scientific.net | - |
| dc.title | Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics | - |
| dc.type | Article | - |
| dc.publisher.location | 스위스 | - |
| dc.identifier.doi | 10.4028/www.scientific.net/SSP.314.197 | - |
| dc.identifier.scopusid | 2-s2.0-85101976800 | - |
| dc.identifier.bibliographicCitation | Solid State Phenomena, v.314, pp 197 - 201 | - |
| dc.citation.title | Solid State Phenomena | - |
| dc.citation.volume | 314 | - |
| dc.citation.startPage | 197 | - |
| dc.citation.endPage | 201 | - |
| dc.type.docType | 정기학술지(Article(Perspective Article포함)) | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.subject.keywordPlus | Bubbles (in fluids) | - |
| dc.subject.keywordPlus | Cleaning | - |
| dc.subject.keywordPlus | Sulfur compounds | - |
| dc.subject.keywordPlus | Bubble cavitation | - |
| dc.subject.keywordPlus | Bubble characteristics | - |
| dc.subject.keywordPlus | Bubble dynamics | - |
| dc.subject.keywordPlus | Cleaning solution | - |
| dc.subject.keywordPlus | Megasonic cleaning | - |
| dc.subject.keywordPlus | Semiconductor processing | - |
| dc.subject.keywordPlus | Sodium dodecyl sulfate | - |
| dc.subject.keywordAuthor | Acoustic cavitation | - |
| dc.subject.keywordAuthor | Anionic Surfactant | - |
| dc.subject.keywordAuthor | EUV mask cleaning | - |
| dc.subject.keywordAuthor | Megasonic cleaning | - |
| dc.identifier.url | https://www.scientific.net/SSP.314.197 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)