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Properties of PECVD films for IC fabrication
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 심종인 | - |
| dc.date.accessioned | 2023-08-07T07:31:38Z | - |
| dc.date.available | 2023-08-07T07:31:38Z | - |
| dc.date.issued | 1985-04 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/113733 | - |
| dc.publisher | Seoul Nat.Univ. | - |
| dc.title | Properties of PECVD films for IC fabrication | - |
| dc.type | Article | - |
| dc.identifier.bibliographicCitation | Seoul Nat.Univ.Eng.Rep | - |
| dc.citation.title | Seoul Nat.Univ.Eng.Rep | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | domestic | - |
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Related Researcher
- Shim, Jong In
- ERICA 첨단융합대학 (ERICA 반도체·디스플레이공학전공)