Advanced PIC-MCC simulation for the investigation of step-ionization effect in intermediate-pressure capacitively coupled plasmas
- Authors
- Kim, Jin Seok; Hur, Min Young; Kim, Chang Ho; Kim, Ho Jun; Lee, Hae June
- Issue Date
- Feb-2018
- Publisher
- IOP Publishing Ltd.
- Keywords
- capacitively coupled plasmas; particle-in-cell simulation; step ionization
- Citation
- Journal of Physics D: Applied Physics, v.51, no.10, pp 1 - 10
- Pages
- 10
- Indexed
- SCI
SCIE
SCOPUS
- Journal Title
- Journal of Physics D: Applied Physics
- Volume
- 51
- Number
- 10
- Start Page
- 1
- End Page
- 10
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/113798
- DOI
- 10.1088/1361-6463/aaa941
- ISSN
- 0022-3727
1361-6463
- Abstract
- A two-dimensional parallelized particle-in-cell simulation has been developed to simulate a capacitively coupled plasma reactor. The parallelization using graphics processing units is applied to resolve the heavy computational load. It is found that the step-ionization plays an important role in the intermediate gas pressure of a few Torr. Without the step-ionization, the average electron density decreases while the effective electron temperature increases with the increase of gas pressure at a fixed power. With the step-ionization, however, the average electron density increases while the effective electron temperature decreases with the increase of gas pressure. The cases with the step-ionization agree well with the tendency of experimental measurement. The electron energy distribution functions show that the population of electrons having intermediate energy from 4.2 to 12 eV is relaxed by the step-ionization. Also, it was observed that the power consumption by the electrons is increasing with the increase of gas pressure by the step-ionization process, while the power consumption by the ions decreases with the increase of gas pressure. © 2018 IOP Publishing Ltd.
- Files in This Item
-
Go to Link
- Appears in
Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MECHANICAL ENGINEERING > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/113798)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.