Dissolvable Template Nanoimprint Lithography: A Facile and Versatile Nanoscale Replication Technique
- Authors
- Oh, Junho; Hoffman, Jacob B.; Hong, Sungmin; Jo, Kyoodong; Román-Kustas, Jessica; Reed, Julian H.; Dana, Catherine E.; Cropek, Donald M.; Alleyne, Marianne; Miljkovic, Nenad
- Issue Date
- Oct-2020
- Publisher
- American Chemical Society
- Keywords
- insect wing; Nanoimprinting; nanomanufacturing; nanostructures; template
- Citation
- Nano Letters, v.20, no.10, pp 6989 - 6997
- Pages
- 9
- Indexed
- SCIE
SCOPUS
- Journal Title
- Nano Letters
- Volume
- 20
- Number
- 10
- Start Page
- 6989
- End Page
- 6997
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/113932
- DOI
- 10.1021/acs.nanolett.0c01547
- ISSN
- 1530-6984
1530-6992
- Abstract
- Nanoimprinting lithography (NIL) is a next-generation nanofabrication method, capable of replicating nanostructures from original master surfaces. Here, we develop highly scalable, simple, and nondestructive NIL using a dissolvable template. Termed dissolvable template nanoimprinting lithography (DT-NIL), our method utilizes an economic thermoplastic resin to fabricate nanoimprinting templates, which can be easily dissolved in simple organic solvents. We used the DT-NIL method to replicate cicada wings which have surface nanofeatures of similar to 100 nm in height. The master, template, and replica surfaces showed a ˃similar to 94% similarity based on the measured diameter and height of the nanofeatures. The versatility of DT-NIL was also demonstrated with the replication of re-entrant, multiscale, and hierarchical features on fly wings, as well as hard silicon wafer-based artificial nanostructures. The DT-NIL method can be performed under ambient conditions with inexpensive materials and equipment. Our work opens the door to opportunities for economical and highthroughput nanofabrication processes.
- Files in This Item
-
Go to Link
- Appears in
Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MECHANICAL ENGINEERING > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/113932)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.