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Effect of amine on oxide and nitride surfaces and ceria contaminatin during STI CMP process
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진구 | - |
| dc.date.accessioned | 2024-01-10T07:31:52Z | - |
| dc.date.available | 2024-01-10T07:31:52Z | - |
| dc.date.issued | 2023-11-20 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/116484 | - |
| dc.title | Effect of amine on oxide and nitride surfaces and ceria contaminatin during STI CMP process | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | KISM 2023 | - |
| dc.citation.conferencePlace | 부산 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)