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Metal oxide thin film deposition technology for manufacturing plasma-resistant substarte materials

Authors
조홍백
Issue Date
28-Nov-2023
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/116565
Place
HICO, Gyengju, Korea
Conference Name
6th International Conference and Exihibition on Powder Metallurgy in Asia
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 2. Conference Papers

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Hong-Baek, Cho
ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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