Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Metal oxide thin film dep osition technology for man ufacturing plasma resistant sub st rate materials
- Authors
- 좌용호
- Issue Date
- 28-Nov-2023
- Place
- 경주시
- Conference Name
- APMA 2023
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- CHOA, YONG HO
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)