Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Ceramic thin film deposition technology for manufacturing plasma-resistant substrate materials for semiconductor processing
- Authors
- 좌용호
- Issue Date
- 7-Apr-2023
- Place
- 창원
- Conference Name
- 2023 한국분말재료학회 춘계학술대회
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- CHOA, YONG HO
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)