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Atomic layer deposition of Ru thin film using a newly synthesized precursor with open-coordinated ligands
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박태주 | - |
| dc.date.accessioned | 2024-01-11T01:30:47Z | - |
| dc.date.available | 2024-01-11T01:30:47Z | - |
| dc.date.issued | 2023-02-15 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/117001 | - |
| dc.title | Atomic layer deposition of Ru thin film using a newly synthesized precursor with open-coordinated ligands | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제30회 한국반도체학술대회 | - |
| dc.citation.conferencePlace | 강원도 하이원리조트 | - |
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Related Researcher
- Park, Tae Joo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)