Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Combined Atomic Layer Deposition and Etching Process towards Advanced Atomic Level Patterning
- Authors
- 김우희
- Issue Date
- 21-Nov-2023
- Conference Name
- KISM 2023
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)