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Simulation of semiconductor fabrication systems using numerical methods
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김호준 | - |
| dc.date.accessioned | 2024-01-11T08:31:51Z | - |
| dc.date.available | 2024-01-11T08:31:51Z | - |
| dc.date.issued | 2022-12-15 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/117626 | - |
| dc.title | Simulation of semiconductor fabrication systems using numerical methods | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | The 8th Korea Multi-Scale Mechanics Symposium 2022 (KMSM 2022) | - |
| dc.citation.conferencePlace | 서울 서초구 바우뫼로12길 70 더케이호텔서울 | - |
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Related Researcher
- Kim, Ho Jun
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)