Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Simulation of semiconductor fabrication systems using numerical methods
- Authors
- 김호준
- Issue Date
- 15-Dec-2022
- Place
- 서울 서초구 바우뫼로12길 70 더케이호텔서울
- Conference Name
- The 8th Korea Multi-Scale Mechanics Symposium 2022 (KMSM 2022)
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Kim, Ho Jun
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)