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Effect of Colloidal Silica and Molybdenum Ions on PVA Brush Loading during Mo Post-CMP Cleaning
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김태곤 | - |
| dc.date.accessioned | 2024-02-10T08:30:53Z | - |
| dc.date.available | 2024-02-10T08:30:53Z | - |
| dc.date.issued | 2023-11-21 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/118090 | - |
| dc.title | Effect of Colloidal Silica and Molybdenum Ions on PVA Brush Loading during Mo Post-CMP Cleaning | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | The Korean Society of Semiconductor & Display Technology | - |
| dc.citation.conferencePlace | Busan, Korea | - |
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Related Researcher
- KIM, TAE GON
- ERICA 공학대학 (MAJOR IN APPLIED MATERIAL & COMPONENTS)