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DFT Analysis of The Adsorption of SinH2n+1 on Silicon Surfaces using SiH4/Ar Capacitively Coupled Plasmas for Fast and Uniform Deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김호준 | - |
| dc.date.accessioned | 2024-07-21T10:01:35Z | - |
| dc.date.available | 2024-07-21T10:01:35Z | - |
| dc.date.issued | 2024-06-26 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/120079 | - |
| dc.title | DFT Analysis of The Adsorption of SinH2n+1 on Silicon Surfaces using SiH4/Ar Capacitively Coupled Plasmas for Fast and Uniform Deposition | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 3RD INTERNATIONAL FUSION AND PLASMA CONFERENCE (iFPC 2024) | - |
| dc.citation.conferencePlace | SEOUL OLYMPIC PARKTEL, SEOUL, KOREA | - |
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Related Researcher
- Kim, Ho Jun
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)