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DFT Analysis of The Adsorption of SinH2n+1 on Silicon Surfaces using SiH4/Ar Capacitively Coupled Plasmas for Fast and Uniform Deposition
- Authors
- 김호준
- Issue Date
- 26-Jun-2024
- Place
- SEOUL OLYMPIC PARKTEL, SEOUL, KOREA
- Conference Name
- 3RD INTERNATIONAL FUSION AND PLASMA CONFERENCE (iFPC 2024)
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Related Researcher
- Kim, Ho Jun
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)