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Understanding Radical Generation and Transmission Mechanisms for Optimization of PEALD Processes and Equipment
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김호준 | - |
| dc.date.accessioned | 2024-07-21T10:01:36Z | - |
| dc.date.available | 2024-07-21T10:01:36Z | - |
| dc.date.issued | 2024-01-16 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/120082 | - |
| dc.title | Understanding Radical Generation and Transmission Mechanisms for Optimization of PEALD Processes and Equipment | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | The 9th International Conference on Microelectronics and Plasma Technology (ICMAP 2024) | - |
| dc.citation.conferencePlace | Booyoung Hotel & Resort Jeju, Korea | - |
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Related Researcher
- Kim, Ho Jun
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)