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Understanding Radical Generation and Transmission Mechanisms for Optimization of PEALD Processes and Equipment
- Authors
- 김호준
- Issue Date
- 16-Jan-2024
- Place
- Booyoung Hotel & Resort Jeju, Korea
- Conference Name
- The 9th International Conference on Microelectronics and Plasma Technology (ICMAP 2024)
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Related Researcher
- Kim, Ho Jun
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)