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Molecular Layer Deposition of a Tin-Based Organic-Inorganic Hybrid Thin Films for Photoresist
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박태주 | - |
| dc.date.accessioned | 2024-12-21T21:31:42Z | - |
| dc.date.available | 2024-12-21T21:31:42Z | - |
| dc.date.issued | 2024-11-12 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/121389 | - |
| dc.title | Molecular Layer Deposition of a Tin-Based Organic-Inorganic Hybrid Thin Films for Photoresist | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | KISM 2024 | - |
| dc.citation.conferencePlace | 부산 파라다이스 호텔 | - |
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Related Researcher
- Park, Tae Joo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)